Silane (SiH4)
Silane is a colorless, flammable gas with a sharp smell.
Silane
Formula: SiH₄
Silane (SiH₄) is a colorless, flammable gas with a sharp smell.
Applications
Specifications
Further Specifications
Cylinder Sizes
- in a semiconductor grade offers a source of high purity silicon for epitaxial and thin film deposits, and for the formation of high purity silicon oxides
| Grade 6 | |
|---|---|
| Purity | 99.9999% |
| Nitrogen | < 0.5 ppmv |
| Oxygen + Argon | < 0.06 ppmv |
| Carbon Dioxide | < 0.05 ppmv |
| Carbon Monoxide | < 0.08 ppmv |
| Hydrogen | < 20 ppmv |
| Water | < 0.5 ppmv |
| Helium | < 1 ppmv |
| Methane | < 0.04 ppmv |
| THC (Sum of C2-C4) | < 0.1 ppmv |
| Total Chlorosilanes | < 0.1 ppmv |
| Disilane | < 0.5 ppmv |
| Disiloxane | < 0.5 ppmv |
| Resistivity, N-Type | > 10,000 |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 32.12 |
| Specific Volume | 12.1 cu. ft/lb |
| Pressure @ 70°F | 275-1250 psig |
| Valve Outlet | CGA 250 DISS 632 |
| Shipping Information | |
|---|---|
| DOT Name | Silane |
| Hazard Class | 2.1 |
| DOT No. | UN 2203 |
| DOT Label | Flammable Gas |
| CAS No. | 7803-62-5 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| 44L/Size 200 | 22 |
| 150 AL | 11 |
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
**RFO available
*This gas not available for purchase online.
