What is Tetrafluoromethane Gas (CF4)?
Tetrafluoromethane (CF4), also known as perfluoromethane, is a colorless, nonflammable, and nontoxic gas. It is chemically inert and has a moderately high global warming potential (GWP = 6,630; Greenhouse gas protocol, Fifth Assessment Report AR5).
Tetrafluoromethane is very stable and has a long atmospheric lifetime of 50,000 years. Although structurally similar to chlorofluorocarbons, tetrafluoromethane does not deplete the ozone layer. This is because the depletion is caused by the chlorine atoms in CFCs, which dissociate when struck by UV radiation. Carbon-fluorine bonds are stronger and less likely to dissociate. It is used as an important component in some ultra-low temperature refrigeration systems and also as a reactive ion etching gas in semiconductor materials processing applications.
Tetrafluoromethane Gas (CF4) Applications
In semiconductor applications, for example, in reactive ion etching, tetrafluoromethane is the largest volume fluorocarbon gas employed. With a fluorine to carbon ratio of 4:1, carbon tetrafluoride provides the highest concentration of highly reactive trifluoromethyl and fluorine radicals without accompanying hydrogen atoms. As a result, semiconductor material plasma etching processes employing tetrafluoromethane are relatively aggressive with respect to fluorine radical formation. On the other hand, plasmas processes involving tetrafluoromethane provide essentially no fluorocarbon film formation properties. In other applications, tetrafluoromethane can be used as a plasma chamber cleaning gas, an expansion agent for polyolefins and polyurethanes, as a propellant for aerosols, as a fire extinguishing agent, and as a gaseous dielectric insulating medium.
EFC Gases is a trusted source when purchasing tetrafluoromethane cylinders because we offer gases of high purity and quality that provide better use applications and superior dimensional and profile control.
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
*This gas not available for purchase online.
