Difluoromethane
Difluoromethane (HFC-32) is a colorless and flammable gas that finds widespread use as a primary refrigerant, as an important component in some refrigeration mixtures, and as a reactive ion etching gas in semiconductor materials processing applications.
Difluoromethane
Formula: CH₂F₂, R32, HFC-32
Difluoromethane (HFC-32, CH₂F₂) is a colorless and flammable gas that finds widespread use as a primary refrigerant, as an important component in some refrigeration mixtures, and as a reactive ion etching gas in semiconductor materials processing applications. As a refrigerant, difluoromethane offers the advantages of low flammability combined with a reasonably low global warming potential (GWP = 677; Greenhouse gas protocol, Fifth Assessment Report AR5) making it an ideal refrigerant gas.
In semiconductor applications, for example in reactive ion etching, difluoromethane with a fluorine to carbon ratio of 2:1 offers a unique source of fluorocarbene radicals with hydrogen atoms. Optimized etching processes with HFC-32 have been used to etching recessed features on semiconductor substrates where the processes provide recessed features with substantially vertical profiles, low bowing, low twisting and highly circular features. In most case, these features can be obtained with a high degree of selectivity and a relatively high etch rate. Etching recipes involving HFC-32 are applicable to silicon oxide, silicon nitride, silicon carbide and other semiconductor material layers.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Currently used as a substitute for R-410a in residential and commercial air conditioners in Japan, China, and India
- Plating agent and surface treating agent
- Plasma etching
- Heat transfer fluid
- Used in refrigerant blends
| Grade 3 | Grade 4 | |
|---|---|---|
| Purity | 99.9% | 99.99% |
| Nitrogen | < 300 ppmv | < 40 ppmv |
| Oxygen | < 50 ppmv | <10 ppmv |
| Carbon Diozide | < 5 ppmv | |
| Moisture | < 100 ppmv | < 5 ppmv |
| Other Halocarbons | < 60 ppmv | |
| Acidity | < 0.1 pp/w | |
| Other Organics | < 700 ppmv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 52.02 |
| Specific Volume | 7.19 cu.ft/lb |
| Pressure @ 70° F | 23.5 psig |
| Valve Outlet: CGA 350 | CGA 350 DISS 724 |
| Shipping Data | |
|---|---|
| DOT Name | Difluoromethane |
| Hazard Class | 2.1 |
| DOT No. | UN 3252 |
| DOT Label | Red, Flammable Gas |
| Cas No. | 75-10-5 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| 44L/Size 200 | 65 |
| 16L/Size 80 | 25 |
| 7L/Size 35 | 15 |
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
*This gas not available for purchase online.
