Methyl Fluoride
Methyl Fluoride is a colorless, flammable gas.
Methyl Fluoride
Formula: CH3F
CAS No: 593-53-3
Methyl Fluoride (CH3F), or fluoromethane (R-41), is a colorless, flammable gas used as a specialty fluorinated gas in semiconductor manufacturing and chemical processing. Its clean decomposition behavior and fluorine content make it effective in plasma environments where controlled reactivity and minimal residue are required.
In semiconductor applications, methyl fluoride is used as an etching gas, providing selective removal of silicon dioxide and related materials. Process performance is influenced by gas flow, pressure, and plasma conditions, enabling precise control of etch profiles and repeatability in advanced device fabrication.
Applications Include:
- Reactive ion etching gas in semiconductor manufacturing.
- Enables selective removal of silicon dioxide and related dielectric materials in plasma processes.
- Supports chamber cleaning and process optimization in semiconductor tools.
- Used in chemical synthesis and fluorination processes.
- Applied in refrigeration (R-41).
EFC Gases & Advanced Materials supplies high-purity methyl fluoride with tight control of moisture and critical impurities, supported by rigorous analytical verification to ensure consistent performance in demanding applications.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Etch semiconductor materials.
- Selectively remove silicon dioxide.
- Clean and optimize process chambers
- Support synthesis and fluorination
- Use in refrigeration (R-41)
| Grade 4 | Grade 4.5 | |
|---|---|---|
| Purity | 99.99% | 99.995% |
| Nitrogen | < 70 ppmv | < 20 ppmv |
| Oxygen | < 20 ppmv | < 5 ppmv |
| Carbon Dioxide | < 10 ppmv | |
| Carbon Monoxide | < 10 ppmv | |
| Methane | < 5 ppmv | |
| Water | < 10 ppmv | < 2 ppmv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 34 |
| Specific Volume | 11.36 cu.ft/lb |
| Pressure @ 70° F | 538 psig |
| Valve Outlet | CGA 350 DISS 724 |
| Shipping Information | |
|---|---|
| DOT Name | Methyl Fluoride |
| Hazard Class | 2.1 |
| DOT No. | UN 2810 |
| DOT Label | Flammable Gas |
| CAS No. | 593-53-3 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| 44L/Size 200 | 33 |
| 16L/Size 80 | 7 |
| 7L/Size 35 | 3 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
