Nitrogen Trifluoride
Nitrogen Trifluoride is a colorless, non-flammable, corrosive gas.
Nitrogen Trifluoride
Formula: NF₃
Nitrogen trifluoride (NF₃) is an inorganic, colorless, non-flammable, toxic gas with a slightly musty odor. It is primarily used to remove silicon and silicon-compounds during the manufacturing of semiconductor devices such as LCD displays, some thin-film solar cells, and other microelectronics. Unlike the fluorinated carbons, Nitrogen Trifluoride is easy to decompose due to relatively low bond energy in N—F bond, and therefore can be a fluorine source.
NF₃ has the ability to act as a stable fluorinating agent and has a wide application scope in high-energy laser at dry etching in semiconductor production as a filling gas in lamps to prolong their durability and increase brightness, as well as a detergent gas in CVD apparatus. For all these reasons, nitrogen trifluoride is increasingly used in the electronics industry, primarily for the etching of microcircuits, and for manufacturing of liquid crystal flat panel displays and thin film PV cells.
Once NF₃ is released into the atmosphere, it circulates from the surface to the stratosphere hundreds of times before it is destroyed by solar ultraviolet radiation. It is nearly chemically inert in the atmosphere, and the average lifetime of an NF3 molecule in the atmosphere is about 550 years.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Used as an etchant in microelectronics
- Used as key chemical agent used to manufacture certain types of photovoltaic cells for solar panels
| Grade 2.7 | Grade 4 | Grade 4.5 | |
|---|---|---|---|
| Purity | 99.7% | 99.99% | 99.995% |
| Oxygen | < 10 ppmv | < 5 pmmv | |
| Oxygen and Argon | < 700 ppmv | ||
| Nitrogen | < 700 ppmv | < 10 ppmv | < 5 ppmv |
| Carbon Dioxide | < 25 ppmv | < 10 ppmv | < 3 ppmv |
| Carbon Monoxide | < 25 ppmv | < 0.5 ppmv | |
| Water | < 1 ppmv | < 1 ppmv | < 1 ppmv |
| Carbon Tetrafluoride | < 1,500 ppmv | < 40 ppmv | < 25 ppmv |
| Nitrous Oxide | < 50 ppmv | < 10 ppmv | < 2 ppmv |
| Acidity (HF) | < 1 ppmv | < 5 ppmv | < 1 ppmv |
| Sulfur Hexafluoride | < 50 ppmv | < 1 ppmv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 71.00 |
| Specific Volume | 5.4 cu.ft/lb |
| Pressure @ 70°F | 1450 psig |
| Valve Outlet | CGA 670 DISS 640 |
| Shipping Information | |
|---|---|
| DOT Name | Nitrogen Trifluoride |
| Hazard Class | 2.2 |
| DOT No. | UN 2451 |
| DOT Label | Non-Flammable Gas and Oxidizer |
| CAS No. | 7783-54-2 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| Tube Trailer | 17,637 |
| 49L/Size 300 | 50 |
| 44L/Size 200 | 44 |
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
*This gas not available for purchase online.
