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Octafluorocyclobutane

Octafluorocyclobutane is a colorless, odorless, non-flammable liquefied gas. It is shipped as a liquefied gas under its own vapor pressure.

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Octafluorocyclobutane

Formula: C4F8, R318, HC-318

Octafluorocyclobutane is a colorless, odorless, non-flammable liquefied gas. It is shipped as a liquefied gas under its own vapor pressure (25 psig @ 70º F). 

Common Uses

Octafluorocyclobutane (C₄F₈) is a critical agent in the semiconductor industry, used extensively for plasma etching. In RF field applications, C₄F₈ generates reactive species that precisely etch silicon, facilitating the production of complex semiconductor devices. Furthermore, the radicals from C₄F₈ plasma can create a protective polymer on the sidewalls of etched features, safeguarding them from chemical attacks and ensuring their structural integrity.

C₄F₈ also plays a significant role in polymer production, serving as a dimer in the synthesis of high-performance fluoropolymers. These polymers are essential for various applications requiring exceptional chemical and thermal resistance.

EFC offers octafluorocyclobutane gas in a variety of purities and concentrations to meet the needs of the semiconductor and polymer industries. For more detailed information on our C₄F₈ products, including tanks and cylinders, please refer to the spec sheets and safety data sheets available below.

 

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Applications
Specifications
Further Specifications
Cylinder Sizes
  • Plasma Etching
  • Making other chemicals
  • Refrigerant (in specialized applications)
  • "Modify" the properties of homofluoropolymers
  • Production and processing of semiconductor materials and devices
  • Deposition gas
  • Replacement of Ozone for depleting chlorofluorocarbon refrigerants
  • Extinguishing agent in fire suppression systems
Grade 3 Grade 3.8 Grade 4.5 Grade 5
Purity 99.9% 99.98% 99.995% 99.999%
Nitrogen < 80 ppmv < 8 ppmv < 3 ppmv
Oxygen < 20 ppmv < 2 ppmv < 1 ppmv
Air (N2+O2+CO+CO2) < 300 ppmv
Moisture < 10 ppmv < 10 ppmw < 3 ppmw < 1 ppmw
Tetrafluorocarbons < 50 ppmv
Other Fluorocarbons < 50 ppmv < 10 ppmv < 4 ppmv
Other Organics < 1000 ppmv
Acidity < 0.1 ppmv/w < 0.1 ppmv/w < 0.1 ppmv/w
Chemical & Physical Properties
Molecular Weight 200.03
Specific Volume 1.85 cu.ft/lb
Pressure @ 70º F 23.5 psig
Valve Outlet CGA 660 DISS 716
Shipping Data
DOT Name Octafluorocyclobutane
Hazard Class 2.2
DOT No. UN 1976
DOT Label Green, Non-flammable gas
CAS No. 115-25-3
Cylinder Size Fill Weight (lb)
49L/Size 300 118
44L/Size 200 100
16L/Size 80 35
7L/Size 35 15

FAQs about Octafluorocyclobutane

How do you handle octafluorocyclobutane gas safely?

We recommend handling Octafluorocyclobutane in a well-ventilated place while wearing suitable protective clothing. Make sure to avoid contact with skin and eyes and avoid the formation of dust and aerosols. Also, it’s important to use non-sparking tools and prevent fire caused by electrostatic discharge steam.  

Before Use: Move cylinders with a suitable hand truck. Do not drag, slide, drop or roll Octafluorocyclobutane cylinders and secure them firmly. Leave the valve protection cap in place (if provided) until the cylinder is ready for use.

During Use: Use designated CGA fittings and other support equipment. Do not use adapters. Do not heat the cylinder by any means to increase the discharge rate of the product from the cylinder. Use a check valve or trap in the discharge line to prevent hazardous backflow into the cylinder. Do not use oils or grease on gas-handling fittings or equipment.

After Use: Close the main cylinder valve. Replace valve protection cap (if provided), then mark empty cylinders “EMPTY.”

How should you store octafluorocyclobutane cylinders?

Octafluorocyclobutane cylinders should be stored in dry, well-ventilated areas away from heat sources. Compressed gases can present significant safety hazards. Store containers away from heavily trafficked areas and emergency exits. Store the container tightly closed in a dry, cool, and well-ventilated place. Store apart from foodstuff containers or incompatible materials.

How is octafluorocyclobutane used in fire suppression?

Octafluorocyclobutane is ideal for fire suppression because it is non-flammable. The gas is stored in liquid form for the fire suppression system and, when released, it physically changes to a gas, a process during which heat is absorbed and flame can be extinguished.

How is octafluorocyclobutane used in plasma etching?

The plasma etching process utilizes a high-speed stream of plasma comprised of a gas mixture and shoots it in pulses at the circuit or chip. The plasma creates a volatile chemical reaction, during which the atoms of the plasma embed themselves at the surface of the circuit or chip, which modifies its physical properties, which is etching. Octafluorocyclobutane is an ideal gas for the plasma mixture because it chemically combines with the other gases, is non-flammable, and produces the proper volatile chemical reaction. 

What industries is octafluorocyclobutane used in?

In addition to plasma etching and fire suppression, octafluorocyclobutane is used as a gas in refrigeration systems, and in some aerosolized food products, as it is non-toxic, non-flammable, and chemically inert. 

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

*This gas not available for purchase online.

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